Тип публикации: статья из журнала
Год издания: 2025
Идентификатор DOI: 10.1016/j.jeurceramsoc.2025.117319
Аннотация: Samarium monosulfide (SmS) is a unique tensometric material. For the first time, SmS ceramics for magnetron sputtering films were synthesized. A powder of up to 100 mol% SmS was produced via the reaction of γ-Sm2S2.98 with excess metallic samarium vapor. The conditions for target and side reactions were determined. SmS ceramic targПоказать полностьюets were fabricated by pressing under standard conditions and annealed at high temperatures. Ceramic properties—density, hardness, and compressive strength—improved with increasing pressing pressure. Conditions for stable magnetron discharge over the SmS target were established. The composition of films deposited on silicon substrates varies with the substrate-to-target angle, transitioning from SmS1.9 to SmS. During magnetron discharge, SmS dissociates into samarium and sulfur, with their distribution approximated by angular equations. High-mass Sm and SmS particles distribute radially, while sulfur concentration forms an ellipse elongated toward low angles. The deposition angle range for SmS was determined.
Журнал: Journal of the European Ceramic Society
Выпуск журнала: Т. 45, № 10
Номера страниц: 117319
ISSN журнала: 09552219
Издатель: Elsevier Science Publishing Company, Inc.